Atomic-Layer-Deposited Aluminum Oxide Thin Films Probed with …
Finally, the density of ALD alumina also varies over a considerable range (2.4–3.5 g·cm –3), depending primarily on the growth temperature. Since many ALD alumina films are structurally amorphous, understanding the effect of the short- and medium-range order on properties is critical for applications. A significant body of …
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